B33 圧力微分計を用いた空気ばね式除振台の外乱補償制御(OS12 フルードパワーの基礎と応用)

概要

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Pneumatic isolation tables are widely used in high-precision processes and measurements to attenuate the vibration transmitted from the floor to the table, but also the vibration generated by the movement of the precision machine. In this paper, a new method for suppressing the second kind of vibration is proposed though feedback control of the differentiated pressure. The purpose of the feedback is to decrease the pressure time constant. Since the pressure change in the air-spring is very small, it is difficult to obtain the differentiated pressure by discrete simultaneous differentiation of pressure. Instead, this value is obtained through direct measurements by a pressure differentiator. Finally, the effectiveness of the proposed method is demonstrated experimentally.
2009-09-01