3J3-2 IDTの方位と膜厚最適化によるボールSAW素子の高度化(圧電デバイス)

概要

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We developed an orientation controlled ball surface acoustic wave (SAW) device with an interdigital transducer (IDT) fabricated at each orientation on the meander belt of the quartz ball and the similar orientation of the langasaite ball which has the similar crystal structure to quartz ball. In langasaite ball, it was suggested that the SAWs propagated on the meander pattern, too. Ball SAW device is susceptible to the mass loading effect, because multiple roundtrips of the SAW. There we fabricated ball SAW devices with an IDT at the similar orientation of the quartz ball by varying the thickness of Cr, and confirmed the attenuation characteristic affected by the mass loading of the IDT. In the quartz device of 100nm IDT thickness, Q factor was 35655 at 148MHz.
2009-11-18