In_<0.3>Ga_<0.7>As Plate Crystals Grown by the Traveling Liquidus-Zone (TLZ) MethodDetailed Results of This Period : Growth of Homogeneous Si_<0.5>Ge_<0.5> Single Crystals by the Traveling Liquidus-Zone Method (Effects of microgravity environment on growt
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概要
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The TLZ method is a new crystal growth method which we have invented for the growth of homogeneous mixed crystals. The influence of convection in a melt on the compositional homogeneity of TLZ-grown InxGa1-xAs crystals was investigated by the growth of various diameter crystals on the ground. The results have shown that excellent compositional homogeneity is realized even on the ground if the crystal diameter is less than 2 mm and convection in a melt is suppressed. However, such small diameter crystals cannot be used for device application. Then, we tried plate crystal growth for obtaining large surface area since the limitation of the thickness of plate crystal is useful for suppressing convection in a melt. In_<0.3>Ga_<0.7>As plate crystals with 10 mm width and 2 mm thickness showed good compositional homogeneity as expected but the grown crystals were poly crystals. Single crystallization of plate crystals is required for device fabrication and we made effort for growing plate-like In_<0.3>Ga_<0.7>As single crystals. Here, we report those results obtained in our study in the fiscal year of 2003.
- 宇宙航空研究開発機構の論文
著者
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宮田 浩旭
(株)エイ・イー・エス
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Adachi Satoshi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Kinoshita K
Ntt Basic Research Laboratory
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YODA Shin-ichi
National Space Development Agency of Japan
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YODA Shinichi
National Space Development Agency of Japan
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Yoda S
Iss Science Project Office Institute Of Space And Astronautical Science Japan Aerospace Exploration
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Yoda Shinichi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Muramatsu Yuji
Advanced Engineering Service Co. Ltd.
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Koshikawa N
Japan Aerospace Exploration Agency
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Kinoshita Kyoichi
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency
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Ogata Yasuyuki
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency
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Koshikawa Naokiyo
Office of Space Flight and Operations, Japan Aerospace Exploration Agency
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Tsuru Tetsuya
Advanced Engineering Service Co. Ltd.
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Miyata Hiroaki
Advanced Engineering Service Co. Ltd.
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Yoda Shinichi
Advanced Engineering Service Co. Ltd.
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Yoda S
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Tsuru Tetsuya
Advanced Engineering Services Co. Ltd.
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Kinoshita Kyoichi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Kinoshita K
Ntt Basic Research Laboratories
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Kinoshita K
Physical Science Laboratory Ntt Basic Research Laboratories
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Kobayashi Keiji
Toshiba Research And Development Center
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Ogata Yasuyuki
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Yoda Shinichi
National Space Davelopment Agency Of Japan
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Koshikawa N
Office Of Space Flight And Operations Japan Aerospace Exploration Agency
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Yasuhiro S
Japan Aerospace Exploration Agency
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Yoda Shinichi
Space Utilization Research Center National Space Development Agency Of Japan
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Adachi Satoshi
Institute Of Space And Astronautical Science (isas) Jaxa
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Yoda Shin‐ichi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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