Scale up of In_xGa_<1-x>A_s (x: 0.08 - 0.13) Platy Crystals for Semiconductor Laser Substrates
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概要
- 論文の詳細を見る
In_xGa_<1-x>A_s (x: 0.1 - 0.2) single crystals are promising as substrates of laser diodes for wavelength of 1.3 μm used in the optical communication system. However, the growth of such ternary bulk single crystals with uniform composition is not easy and high quality substrates have not been prepared before we succeeded in growing InxGa1-xAs (x: 0.1 - 0.13) platy crystals by the TLZ method. The TLZ method, which we originally invented for homogeneous alloy crystal growth in microgravity [1-3], requires diffusion limited mass transport and convection in a melt should be avoided. In order to fulfill both requirements of large surface area for substrates and suppression of convection during crystal growth, we grew platy crystals instead of large diameter cylindrical crystals. Convection in a melt was sufficiently suppressed by limiting the thickness of platy crystals to 2 mm. As a result, homogeneous In_xGa_<1-x>A_s (x: 0.08 - 0.13) single crystals with high quality surface area of larger than 10×10mm^2 were grown. For substrate use, larger area is required and mass productivity is also required. This year, we studied scale up of platy crystals in preparation for commercialization of laser diodes as well as improvement of crystal quality. Here, we report on the results obtained this year.
- 宇宙航空研究開発機構の論文
著者
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Adachi Satoshi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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YODA Shin-ichi
National Space Development Agency of Japan
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YODA Shinichi
National Space Development Agency of Japan
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Yoda S
Iss Science Project Office Institute Of Space And Astronautical Science Japan Aerospace Exploration
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Yoda Shinichi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Kinoshita Kyoichi
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency
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Kinoshita Kyoichi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Kinoshita K
Ntt Basic Research Laboratories
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Kinoshita K
Physical Science Laboratory Ntt Basic Research Laboratories
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Kinoshita Kyoichi
Ss Science Project Office Institute Of Space And Astronautical Science Japan Aerospace Exploration A
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UEDA Toshiaki
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency
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ARAI Yasutomo
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency
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Yoda Shinichi
National Space Davelopment Agency Of Japan
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Arai Yasutomo
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Ueda Toshiaki
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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Adachi Satoshi
Institute Of Space And Astronautical Science (isas) Jaxa
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Yoda Shin‐ichi
Institute Of Space And Astronautical Science Japan Aerospace Exploration Agency
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