超精密加工用3軸制御ファストツールサーボの開発(第3報) : 工具の高速制御によるマイクロ光学デバイス金型の高速加工

概要

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A new three-axis FTS system has been developed for ulrtaprecision machining. The 3-axis FTS unit can drive the cutting tool freely in the space by controlling the motion of the three piezoelectric actuators arranged along the three axes of the orthogonal coordinates. In this report, high-speed machining of dies and molds of micro structural array for optical devices has been studied by employing high speed 3-axis motion of the FTS unit. The transient motion error of the machining stage equipped with the work is also compensated with use of the FTS while the work is fed to the machining area in the step and repeat manner. The dies for a micro-prism array and a micro-lens array could be machined by using the developed FTS machining system at high speed.
2008-09-05