318 X線CT画像の画質向上に関する研究 : メタルアーチファクトの低減手法の提案(OS-10 加工計測・評価)

概要

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Micro-computed tomography is quite useful for the quality evaluation of MEMS devices because it provides three-dimensional geometrical information of internal structures of the devices. However, large differences in X-ray absorption coefficients of materials produces streak and star pattern artifacts in the CT images. This study aims to develop a new reconstruction algorithm to reduce the artifacts from the images. In this paper, we discuss the cause of the artifacts using CT data of a sample. Examining the CT data of the sample, we find that there are significant variations in the amount of the X-ray absorption depending on the direction of the X-ray radiation. Then we measure the relationship between thickness of the metallic object and x-ray attenuation and perform numerical simulation based on the measured result.
一般社団法人日本機械学会の論文
2006-11-24