Development of 3D Focused-Ion-Beam (FIB) Etching Methods for Fabricating Micro- and Nanodevices
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-30
著者
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Sato M
Faculty Of Engineering Niigata University
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Kim S‐j
Pohang Univ. Sci. And Technol. Kyungbuk Kor
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Maeda H
National Research Inst. Metals Ibaraki
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Maeda H
National Research Institute For Metals Tsukuba Laboratories
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Nagao Masanori
Department Of Applied Microbial Technology Kumamoto Institute Of Technology
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Yamashita Tsutomu
National Institute For Material Science (nims):new Industry Creation Hatchery Center (niche) Tohoka
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Yamashita Tomohiro
Ulsi Development Center Mitsubishi Electric Corporation
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Kim S‐j
National Institute For Material Science (nims):new Industry Creation Hatchery Center (niche) Tohoka
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KIM Sang-Jae
National institute for Material Science (NIMS)
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NAGAO Masanori
Kitami institute of Technology
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SATO Mitsunori
Kitami institute of Technology
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MAEDA Hiroshi
Kitami institute of Technology
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Yamashita Tsutomu
Nanomaterials Laboratory National Institute For Materials Science
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