エアロゾル・デポジション法により作製したFe/Ni-Zn-Cuフェライト複合膜における組成制御と電磁ノイズ抑制効果

概要

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Fe/Ni-Zn-Cu ferrite composites films were prepared by the aerosol deposition (AD) method using double nozzles to control the Fe content in AD composite films. As aerosol flow of fine particles is produced by the vibration of aerosol chamber and carrier gas, the vibration frequency of the Fe chamber, which is one of AD conditions was considered to be one of the most effective parameter for controlling Fe content in AD films. When the vibration frequency was increased from 300 rpm to 330 rpm, the thickness and saturation magnetization of the films increased linearly, and the μ_r" value of the films also rose to a maximum of 18 (330rpm). SEM-EDX analysis showed that AD composite films prepared at vibration frequencies of 300 rpm, 310 rpm and 330 rpm contained 20%, 65% and 92% Fe, respectively, and revealed clearly the linear change in the Fe composition with the vibration frequency. In addition, the sample prepared at vibration frequency of 330 rpm showed the maximum noise suppression effect (ΔP_<loss>/P_<in>) of 0.59, which was comparable to the value in our previous work. This result demonstrates that the Fe composition in AD composite films can be controlled by using double nozzles.
2006-09-01