TiN薄膜の機械的特性に及ぼす成膜後基板焼入れ時の加熱時間の影響(S05-3 薄膜の強度物性,S05 薄膜の強度物性と信頼性)

概要

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A specimen which substrate was quenched after TiN coating was prepared, and the effects of heating time of the post quenching on the mechanical properties of TiN film were investigated. The residual stress and the hardness of TiN film were decreased with increasing the heating time. The adhesive strength and the substrate hardness were increased by the post quenching. With increasing the heating time, they once increased and then became constant from a heating time. In order to improve the adhesive strength and the substrate hardness with minimizing the decreases of the residual stress and TiN hardness, it is necessary to quench the steel substrate in the minimum heating time of which the adhesive strength and the substrate hardness are improved.
2004-09-04