マルチ入出力光スイッチ用マイクロマニピュレータのはり要素の形状寸法決定(マイクロメカトロニクス,IIP2004 情報・知能・精密機器部門講演会)

概要

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In the present paper, we first derive a mathematical model for a spiral beam model micro manipulator for optical switches and then we show that this mathematical model simulates the device correctly by checking its results. We use this mathematical model for design of fabrication parameters of this micro manipulator. We will show that the designed micro manipulator for optical switches is capable of rotating the reflecting mirror by 32° with operating voltage of 163 volts. Also the state, of stress analysis of switch model shows that the generated stress in the structure (369 MPa) is well beneath the fracture strength (7000 MPa). We also suggest a control method for this optical switch using our mathematical model.
2004-03-22