414 マルチ入出力光スイッチ用大角変位2自由度ミラー(人間と機械III)(OS.4 人間と機械)

概要

論文の詳細を見る
Studies on optical switches have been researched and developed for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at mirror parts inside the manipulator. Therefore, in order to develop optical switches capable of switching multi input and output, we suggested an electrostatic driving-type 2-DOF micro-manipulator that was composed of many beams as well as a micro mirror that is capable of large angular output displacement. After having studied shapes and sizes of micro-manipulators capable of large angular displacement based on theoretical analysis, we also discovered that the suggested micro-manipulator can have a large angular displacement. Moreover, our study suggested the manufacturing process using a minute manufacturing process and then confirmed the adequacy of the suggested electrostatic driving-type micro-manipulator after having manufactured and studied a micro-manipulator model.
2001-03-09