215 マルチ入出力光スイッチ用マイクロマニピュレータの変位解析(OS4-1 機構の開発とシミュレーション)

概要

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Studies on optical switches have been researched and developed for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at mirror parts inside the manipulator. Therefore, in order to develop optical switches capable of switching multi input and output, we suggest an electrostatic driving-type micro-manipulator that is capable of large angular output displacement by low applied voltage. The manipulator is driven by the method of suction between the beam supporting a mirror and the fixed plate with a insulating membrane on it. From the theoretical analyses, the manipulator output the 32-degrees angular displacement with an applied voltage of 95 volts.
2001-03-30