Production Mechanism in an ECR-Type Multiply-Charged Ion Source
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概要
- 論文の詳細を見る
A calculation model is proposed for the production of multiply-charged ions in an ECR plasma. Numerical calculations have been carried out using this model to estimate the charge state distribution of multiply-charged ions. It was expected that the K-shell ionization process or the charge exchange process would considerably affect the charge state distribution in the ECR plasma. Thus the charge state distributions of ions produced in the ECR plasma were measured as functions of gas pressure and input microwave power, and on comparing the measured and calculated distributions, it was recognized that K-shell ionization and charge exchange can not be neglected for a high input-power of about 1000 W and a high gas-pressure of 2.4×10^<-4> Torr.
- 社団法人応用物理学会の論文
- 1981-05-05
著者
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Yamamoto Takenori
Deptarment Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Yamamoto Tokujirou
Department Of Materials Science And Engineering Kyoto University
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Oda Keiji
The Institute Of Scientific And Industrial Research Osaka University:(present Address)kobe Universit
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KAWANISHI Masaharu
The Institute of Scientific and Industrial Research, Osaka University
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YAMAMOTO Takayoshi
The Institute of Scientific and Industrial Research, Osaka University
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ABE Nobuyuki
The Welding Research Institute of Osaka University
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Kawanishi Masaharu
The Institute Of Scientific And Industrial Research Osaka University
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Yamamoto Takayoshi
The Institute Of Scientific And Industrial Research Osaka University
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