Production of Multiply-Charged Ions in an ECR Plasma
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概要
- 論文の詳細を見る
Multiply-charged ions of various rare gases have been produced in an ECR plasma. Their charge state distributions and the X-rays from the plasma have been measured simultaneously as a function of gas pressures. The yields of multiply-charged ions in each charge state depend on the gas pressure and correlate with the intensity of characteristic X-rays. The charge state distribution obtained experimentally is compared with that calculated by the use of the balance model. The difference between them at low pressures is discussed in connection with the innershell ionization.
- 社団法人応用物理学会の論文
- 1980-01-05
著者
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Yamamoto Takenori
Deptarment Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Yamamoto Tokujirou
Department Of Materials Science And Engineering Kyoto University
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Oda Keiji
The Institute Of Scientific And Industrial Research Osaka University:(present Address)kobe Universit
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KAWANISHI Masaharu
The Institute of Scientific and Industrial Research, Osaka University
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YAMAMOTO Takayoshi
The Institute of Scientific and Industrial Research, Osaka University
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ABE Nobuyuki
The Welding Research Institute of Osaka University
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ABE Nobuyuki
The Institute of Scientific and Industrial Research, Osaka University
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Kawanishi Masaharu
The Institute Of Scientific And Industrial Research Osaka University
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Yamamoto Takayoshi
The Institute Of Scientific And Industrial Research Osaka University
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