A New Approach of E-beam Proximity Effect Correction for High-Resolution Applications

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Observation of X-Ray Diffraction Spots from the (√×√)R30°Bi Structure on the Si(111) Surface under the Condition of Large Incidence Angle
Structural and Electronic Properties of Adsorbed Thiophene on Cu(111) Studied by S K-Edge X-Ray Absorption Spectroscopy
Local Structures of Carbon Thin Films Synthesized by the Hot Filament Chemical Vapor Deposition Method X-Ray-Absorption Near-Edge Structure and Raman Spectroscopic Studies
Temperature-Dependent Br K-Edge EXAFS Study on AgBr_xCl_ Solid Solutions
Applicability of the Soft X-Ray Standing-Wave Method to Surface Structure Determination
XANES and Raman Spectroscopic Studies of Diamond Films Synthesized by Hot Filament CVD
Bromine Adsorption on Supported Palladium Ultrafine Particles Studied by Br K-Edge EXAFS Spectroscopy
Surface Structure of N/Pd(100)-c(2 × 2) Determined by Tensor Low Energy Electron Diffraction Analysis
Structure, Composition, and Vibrational Property of Iodine-Doped Polyvinyl Alcohol Studied by Temperature-Dependent I K-Edge Extended X-Ray-Absorption Fine Structure
Local Structures of RbBr_xCl_ and CuBr_xCl_ Solid Solutions Studied by Temperature-Dependent Br K-Edge Extended X-Ray-Absorption Fine-Structure Spectroscopy
X-Ray Mask Distortion Induced in Back-Etching Preceding Subtractive Fabrication: Resist and Absorber Stress Effect
Reduction of X-Ray Irradiation-Induced Pattern Displacement of SiN Membranes Usirng H^+ Ion Implantation Technique
New Computed Tomography Algorithm of Electrostatic Force Microscopy Based on the Singular Value Decomposition Combined with the Discrete Fourier Transform
Simulated Computed Tomography for the Reconstruction of Vacancies Using an Atomic Force Microscope Image
Feasibility Study on a Novel Type of Computerized Tomography Based on Scanning Probe Microscope
Hierarchy Optimization: A Means to Enhance Efficiency in E-Beam and Optical Lithography
Observation of GaAs(110) Surface by an Ultrahigh-Vacuum Atomic Force Microscope
Effect of the Soft X-Ray Standing Wave Fields on the Total Electron Yield Spectra from an InP Crystal
A New Approach of E-beam Proximity Effect Correction for High-Resolution Applications
Study of Pulse Erasing on Phase-Change Erasable (PCE) Sampled Servo Disc : Media
Study of Pulse Erasing on Phase-Change Erasable (PCE) Sampled Servo Disc
New Disk Structure for Million Cycle Overwritable Phase Change Optical Disk
Conformal Chermical Vapor Deposition TiN(111) Film Formation as an Underlayer of Al for Highly Reliable Interconnects
Characterization of Direct-Contact Via Plug Formed by Using Selective Aluminum Chemical Vapor Deposition
Improvement in Radiation Stability of SiN X-Ray Mask Membranes
Recording and Erasing Characteristics at a Wavelength of 680 nm for a Phase-Change Disk Designed for 830 nm Wavelength
Thin Injection-Molded Substrate for High Density Recording Phase-Change Rewritable Optical Disk
Metalorganic Chemical Vapor Deposition of Aluminum-Copper Alloy Films
Improvement of Gap-Filling Property of O_3-tetraethylorthosilicate (TEOS) Film by Ethanol Surface Treatment
Optically High Transparent SiN Mask Membrane with Low Stress Deposited by Low Pressure Chemical Vapor Deposition
Fabrication of X-Ray Mask Using W-CVD for Forming Absorber Pattern : Lithography Technology
AlGaAs Window Stripe Buried Multiquantum Well Lasers
Cross Sectional Transmission Electron Microscopy of Zn Diffusion Induced Disordering of GaAlAs-GaAs Multiquantum-Well Structures
AlGaAs/GaAs Multiquantum Well Lasers with Buried Multiquantum Well Optical Guide
AlGaAs/GaAs Buried Multiquantum Well Lasers with a Reactive Ion Etched Window Facet
Fabrication of X-Ray Mask Using W-CVD for Forming Absorber Pattern
Phase Change Disk Media Having Rapid Cooling Structure : PHASE CHANGE MEDIA I
Asymmetric Hydroformylation of Olefins in Higyly Crosslinked Polymer Matrixes
Sub-Half-Micron I-Line Lithography by Use of LMR-UV Resist : Lithography Technology
Sub-Half-Micron i-Line Lithography by Use of LMR-UV Resist

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