Seeded Electron Beam Recrystallization of Large Area SOI Using Striped Tungsten Encapsulation Technique

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1987-06-20

著者

• Kudo Jun

  Central Research Laboratories Sharp Corporation

• Kudo J

  Semiconductor Technol. Academic Res. Center Yokohama Jpn

• Kudo Jun

  Department Of Biotechnology Tottori University

• KAKIMOTO Seizo

  Central Research Laboratories, Sharp Corporation

• Kakimoto Seizo

  Central Research Laboratories Sharp Corporation

• KOBA Masayoshi

  Central Research Laboratories, SHARP Corporation

• AWANE Katunobu

  Central Research Laboratories, Sharp Corporation

• Awane Katunobu

  Central Research Laboratories Sharp Corporation

• Koba M

  Sharp Corp. Chiba Jpn

• Koba Masayoshi

  Central Research Laboratories Sharp Corporation

• Mitsuhashi K

  Central Research Laboratories Sharp Corporation:(present Address)functional Devices Laboratories Sha

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