Time Variation of Plasma Properties in a Pulse-Time-Modulated Electron Cyclotron Resonance Discharge of Chlorine Gas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-08-15
著者
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SAMUKAWA Seiji
Microelectronics Research Laboratories, NEC Corporation
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Mieno Tetsu
Department Of Physics Shizuoka University
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Mieno Tetsu
Department Of Physics Faculty Of Science Shizuoka University
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Samukawa Seiji
Microelectronics Research Laboratories Nec Corporation
関連論文
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- Analysis of Ion Species in Potassium-Fullerene Plasmas
- Neutralized, Collisionless, Surface Ionized Ion Beam Source
- Optimum Condition for Spatial Ion Cyclotron Resonance in a Multiple Magnetic Mirror Field
- Time Variation of Plasma Properties in a Pulse-Time-Modulated Electron Cyclotron Resonance Discharge of Chlorine Gas
- Control of Hydrocarbon Radicals and Amorphous Carbon Film Deposition by Means of RF Whistler Wave Discharge
- Experimental and Numerical Studies of Heat Convection in the Synthesis of Single-Walled Carbon Nanotubes by Arc Vaporization
- Spatial Evolution of Ion Beams Passing through a Multiple Magnetic Mirror Field
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