Radial Diffusion of Negative Ions Produced by Magnetized String-Type CF4 Plasma
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概要
- 論文の詳細を見る
Fluorine negative ions (F-) produced by a column-type magnetized plasma with CF4 gas diffuse radially and accumulate around the plasma column. To explain the features of this accumulation, the radial profiles of the negative-ion density $n_{-}$ as functions of discharge parameters are measured using a hot-wire-type Langmuir probe. The modified Bohm theory is applied to evaluate $n_{-}$ as $n_{-}/n_{\text{e}}>2$ and the negative ions are well confined between two end plates. $n_{-}$ around the plasma column decreases with increasing magnetic field from 0.01 to 0.15 T. With increasing pressure from 0.25 to 1.1 Pa, $n_{-}$ around the plasma column gradually decreases.
- Japan Society of Applied Physicsの論文
- 2007-01-15
著者
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Mieno Tetsu
Department Of Physics Faculty Of Science Shizuoka University
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Mieno Tetsu
Department of Physics, Faculty of Science, Shizuoka University, Ooya, Suruga-ku, Shizuoka 422-8529, Japan
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Imitaz M.
Department of Physics, Faculty of Science, Shizuoka University, Ooya, Suruga-ku, Shizuoka 422-8529, Japan
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