Cyclotron Resonance Mass Spectrometry of Ionic Radicals in Magnetized CF_4 Plasma (<Special Issue> Plasma Processing)
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The mass distribution of ionic radicals in a magnetized CF_4 plasma is measured by a newly developed ion cyclotron resonance mass spectrometer (ICR-MS). The density ratio of CF^+ to CF^+_3 increases with plasma density for DC discharge and decreases with CF_4 pressure for electron cyclotron resonance discharge. Negative ions F^- and F^-_2 are detected at a CF_4 gas pressure of 3-9×10^<-4> Torr for DC discharge. Fragmentation of a CF_4 gas by electron beam injection is also measured by this spectrometer.
- 社団法人応用物理学会の論文
- 1994-07-30
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