Metalorganic Chemical Vapor Deposition of GaAs on (111)B Substrates by Using Diethylgalliumchloride
スポンサーリンク
概要
- 論文の詳細を見る
Metalorganic chemical vapor deposition (MOCVD) of GaAs was carried out on (111)B just and 1°-misoriented substrates by using diethylgalliumchloride (DEGC). A smooth surface morphology was obtained for (111)B just substrates above the growth temperature of 620℃, while giant steps were observed for 1°-misoriented-(111)B substrates. The occurrence of the step bunching on the misoriented substrates was due to the reevaporation enhancement effects (REE) of GaCl precursors supplied from DEGC.
- 社団法人応用物理学会の論文
- 1992-07-01
著者
-
ITO Osamu
Department of Neurosurgery, Shi-Koga Hospital
-
Okamoto Kotaro
Department Of Electronics Engineering Shizuoka University
-
Okamoto Kotaro
Department Of Communication Engineering University Of Electro-communications
-
Okamoto Kotaro
Department Of Electronic Engineering The University Of Electro-communications
-
Yamaguchi Ko-ichi
Department Of Electronics Engineering Shizuoka University
-
Yamaguchi Ko-ichi
Department Of Electronic Engineering The University Of Electro-communications
-
Ito Osamu
Department Of Electronic Engineering The University Of Electro-communications
-
Ito Osamu
Department Of Agricultural Chemistry University Of Tokyo
関連論文
- Coil Embolization of a Ruptured Aneurysm Arising From a Middle Cerebral Artery Fenestration : Case Report
- Renoprotective Effect of Angiotensin-Converting Enzyme Inhibitor Combined with α_1-Adrenergic Antagonist in Spontaneously Hypertensive Rats with Renal Ablation
- Assessment of Time-Resolved, Dynamic, Contrast-Enhanced MRDSA Using Radial Sliding-Window Reconstruction
- Ambulatory Blood Pressure Monitoring in Evaluating the Prevalence of Hypertension in Adults in Ohasama, a Rural Japanese Community
- Insulinoma with Suvsequent Association of Zollinger-Ellison Syndrome
- Islet Cell Tumor in von Hippel-Lindau Disease
- Effects of Antihypertensive Drugs and Exercise Training on Insulin Sensitivity in Spontaneously Hypertensive Rats
- Mechanism behind Augmentation in Baroreflex Sensitivity after Acute Exercise in Spontaneously Hypertensive Rats
- Enzyme Electrode for Hydrogen Peroxide Using a New Enzyme-Immobilization "Polymer-Enzyme Aggregate"
- Regulation of Cytochrome P-450 4A Activity by Peroxisome Proliferator-Activated Receptors in the Rat Kidney
- Effects of Substrate Solubility in Interesterification with Triolein by Immobilized Lipase in Supercritical Carbon Dioxide
- Highly Selective Solvation of Monopositive Metal Ions in the Gas Phase as Revealed by the Laser Ablation-Molecular Beam Method Using Ammonia-Water Binary Clusters
- Selective Epitaxial Growth of GaAs by Metalorganic Chemical Vapor Deposition
- Doping Properties of GaAs Selective Epilayers Grown by Atmospheric-Pressure Metalorganic Chemical Vapor Deposition
- V/III Flux Ratio Dependence of InAs Epilayers Grown on GaAs Subsutrates by Molecular Beam Epitaxy
- InGaAs Epilayers of High In Composition Grown on GaAs Substrates by Molecular Beam Epitaxy
- Lateral Supply Mechanisms in Selective Metalorganic Chemical Vapor Deposition
- INCORPORATION OF ^CO_2 AND ^NH_4 INTO AMINO ACIDS OF THE TWO SUBUNITS OF FRACTION 1 PROTEIN IN SPINACH LEAVES
- Amino acid metabolism in plant leaf IV. The effect of light on ammonium assimilation and glutamine metabolism in the cells isolated from spinach leaves
- Anisotropic Ridge Growth by Step-Flow-Mode Metalorganic Chemical Vapor Deposition Using Diethylgalliumchloride
- MES-FETs Fabricated on Doped a-Si Films
- Metalorganic Chemical Vapor Deposition of GaAs on (111)B Substrates by Using Diethylgalliumchloride
- A Case of Exercise-Lnduced Acute Renal Failure in a Patient with Idiopathic Renal Hypouricemia Developed during Antihypertensive Therapy with Losartan and Trichlormethiazide
- Factor XIIIa-positive dermal dendritic cells in keloids and hypertrophic and mature scars
- Coil Embolization for a Ruptured Posterior Cerebral Artery Aneurysm With Vertebrobasilar Dolichoectasia : Case Report
- AMINO ACID METABOLISM IN PLANT LEAF : III. The Effect of Light on the Exchange of ^N-Labeled Nitrogen among Several Amino Acids in Sunflower Discs
- Organosoluble Oligomer Obtained by Glycolysis of Poly (ethylene terephthalate) and Its Detailed Structural Characterization by MALDI-TOF Mass Spectrometry
- Electrical Stimulation of the Abdomen Preserves Motor Performance in the Inactive Elderly : A Randomized Controlled Trial
- Metal-catalyzed organic photoreactions. Photoreactions of compounds containing a carbon-oxygen or carbon-nitrogen multiple bond with alcohols in the presence of titanium(IV) chloride or uranyl chloride.
- Immunochemical Differences between Low- and Ordinary-temperatureactive Proteinases from Streptococcus lactis