Sensitivity Coefficients of Pirani Gauge for Various Atoms and Molecules

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概要

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• The sensitivity coefficients of a Pirani gauge in a constant voltage with bridge imbalance monitoring have been determined for various atoms and molecules. Except for light particles such as He atoms, H_2 and D_2 molecules, the observed coefficients show a strong correlation with the reduced thermal conductivities of free gas particles.

• 社団法人応用物理学会の論文
• 1998-01-15

著者

• TAWARA Hiroyuki

  National Institute for Fusion Science

• Horiuchi Tadahiko

  ULSI Device Development Lab., NEC Corporation

• KUSAKABE Toshio

  Department of Nuclear Reactor Engineering,Faculty of Science and Technology,Kinki University

• Horiuchi Tadahiko

  Ulsi Device Development Lab. Nec Corporation

• Kusakabe Toshio

  Department Of Nuclear Engineering Faculty Of Science And Technology Kinki University

• Tawara Hiroyuki

  National Institute Fbr Fusion Science

• Nakai Yohta

  Atomic Energy Research Institute Kinki University

• TAWARA Hiroyuki

  National Instetute for Fusion Science

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