Epitaxial Growth of TiSi_2 (C49) on (001)Si by Rapid Thermal Annealing
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-10-15
著者
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WU Shinn-Tyan
Department of Materials Science and Engineering, National Tsing-Hua University
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Wu S‐t
National Tsing‐hua Univ. Hsinchu Twn
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Wu Shinn-tyan
Department Of Material Science And Engineering National Tsing-hua University
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Wu Shinn-tyan
Department Of Materials Science And Engineering National Tsing Hua University
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WANG Li-Ming
Department of Material, Science and Engineering, National Tsing-Hua University
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Wang L‐m
National Tsing‐hua Univ. Hsinchu Twn
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Wang Li-ming
Department Of General Surgery Second Affiliated Hospital Of Dalian Medical University
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Wang Li-ming
Department Of Materials Science And Engineering National Tsing Hua University
関連論文
- Epitaxial Growth of C54 TiSi_2 on Si (001) as Revealed by High Resolution Transmission Electron Microscope
- Epitaxial Growth of TiN(100) on Si(100) by Reactive Magnetron Sputtering at Low Temperature
- Epitaxial Growth of C54 TiSi_2 on Si(001) by Self-Aligned Process
- Dual-Layer Structure of Ti on Al_2O_3(0001) Grown Epitaxially at Room Temperature
- Heteroepitaxial TiN of Very Low Mosaic Spread on Al_2O_3
- Epitaxial Growth of TiN on Al_2O_3 at Cryogenic Temperature
- Epitaxial Growth of TiSi_2 (C49) on (001)Si by Rapid Thermal Annealing
- Epitaxial Growth of TiC (002) on Si (001) by Reactive Magnetron Sputtering at Low Temperatures
- Influence of Interfacial Oxide on Self-Alignment Silicide Process
- Protective Effect of Carnosol on Lung Injury Induced by Intestinal Ischemia/Reperfusion
- SiCのコロイドプロセッシングと液相焼結
- Heteroepitaxial TiN of Very Low Mosaic Spread on Al2O3
- Epitaxial Growth of TiN(100) on Si(100) by Reactive Magnetron Sputtering at Low Temperature
- Dual-Layer Structure of Ti on Al2O3(0 0 0 1) Grown Epitaxially at Room Temperature
- Epitaxial Growth of TiN on Al2O3 at Cryogenic Temperature
- Influence of Interfacial Oxide on Self-Alignment Silicide Process
- Epitaxial Growth of TiC (002) on Si (001) by Reactive Magnetron Sputtering at Low Temperatures