Heteroepitaxial TiN of Very Low Mosaic Spread on Al2O3

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概要

• 論文の詳細を見る

• Epitaxial growth of a titanium nitride film on sapphire is achieved at room temperature by means of reactive sputtering. An exceptionally low full-width at half maximum (FWHM) from the X-ray rocking curve of 0.07° (252 arcsec) is measured for the film grown at 600°C with a thickness of 50 nm.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2003-01-15

著者

• Wu Shinn-tyan

  Department Of Material Science And Engineering National Tsing-hua University

• Lin Yan-ru

  Department Of Materials Science And Engineering National Tsing-hua University

• Guo Xing-jian

  Department Of Chemistry National Tsing-hua University

• Chen Wei-chuan

  Department Of Chemical Engineering National Tsing Hua University

• Guo Xing-Jian

  Department of Chemistry, National Tsing-Hua University, Hsinchu 30043, Taiwan, R.O.C.

• Wu Shinn-Tyan

  Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30043, Taiwan, R.O.C.

• Lin Yan-Ru

  Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30043, Taiwan, R.O.C.

関連論文

• Epitaxial Growth of C54 TiSi_2 on Si (001) as Revealed by High Resolution Transmission Electron Microscope
• Epitaxial Growth of C54 TiSi_2 on Si(001) by Self-Aligned Process
• Dual-Layer Structure of Ti on Al_2O_3(0001) Grown Epitaxially at Room Temperature
• Heteroepitaxial TiN of Very Low Mosaic Spread on Al_2O_3
• Epitaxial Growth of TiN on Al_2O_3 at Cryogenic Temperature
• Epitaxial Growth of TiSi_2 (C49) on (001)Si by Rapid Thermal Annealing
• Epitaxial Growth of TiC (002) on Si (001) by Reactive Magnetron Sputtering at Low Temperatures
• Influence of Interfacial Oxide on Self-Alignment Silicide Process
• Compare the effects of chondrogenesis by culture of human mesenchymal stem cells with various type of the chondroitin sulfate C(CELL AND TISSUE ENGINEERING)
• Heteroepitaxial TiN of Very Low Mosaic Spread on Al2O3
• Epitaxial Growth of TiN(100) on Si(100) by Reactive Magnetron Sputtering at Low Temperature
• Dual-Layer Structure of Ti on Al2O3(0 0 0 1) Grown Epitaxially at Room Temperature
• Epitaxial Growth of TiN on Al2O3 at Cryogenic Temperature
• Influence of Interfacial Oxide on Self-Alignment Silicide Process
• Epitaxial Growth of TiC (002) on Si (001) by Reactive Magnetron Sputtering at Low Temperatures

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