Diffusion Profiles of Arsenic in Silicon Observed by Backscattering Method and by Electrical Measurement
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1974-02-05
著者
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Ohkawa Shinji
Fujitsu Laboratories Ltd.
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SAKURAI Teruo
Fujitsu Laboratories Limited
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Sakurai Teruo
Fujitsu Laboratories Ltd.
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Nakajima Yoshio
Fujitsu Laboratories Ltd.
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Nishi Hidetoshi
Fujitsu Laboratories Limited
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FUKUKAWA Yukio
Fujitsu Laboratories Ltd.
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