新型混合双光束激光退火法的模〓分析
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概要
- 論文の詳細を見る
We propose a novel mixed dual beam laser crystallization method, where two different pulse lasers with different wavelength successively irradiate on Si film. Thermodynamic computer model of laser annealing is used to analyze the solidification characteristics of Si film annealed by the novel method. The simulation results demonstrate that the novel method is a promising one to reduce solidification velocity effectively.
- 社団法人映像情報メディア学会の論文
- 1997-02-13
著者
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Zhao Ying
Institute of Bioengineering and Nanotechnology
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Zhang Jianjun
Institute Of Photoelectronics Nankai Univ.
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Zhao Y
Nankai Univ. Tianjin Chn
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Zhao Ying
Institute Of Photoelectronics Nankai University
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〓 穎
中国天津南〓大学光〓子所
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Zhang Y
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Chen Shao-shan
Std Display Techno1ogy Engineering Co. Ltd
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Wu Chunya
Institute of photoelectronics, Nankai Univ.
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Sun Zhonglin
Institute of photoelectronics, Nankai Univ.
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Sun H.Yale
XMR Inc.
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Chen Sheau-Shen
XMR Inc.
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Sun H.
XMR Inc.
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Wu Chunrya
Institute Of Photoelectronics Nankai Univ.
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〓 宏〓
Xmr Inc.
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Wu Chunya
Institute Of Photoelectric Device & Technology Nankai Univ.
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〓 春〓
中国天津南〓大学光〓子所
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Sun Zhonglin
Institute Of Photoelectronics Nankai Univ.
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〓 〓昇
XMR Inc.
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〓 穎
Institute of photoelectronics, Nankai Univ.
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〓 〓林
Institute of photoelectronics, Nankai Univ.
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〓 春〓
Institute of photoelectronics, Nankai Univ.
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〓 建〓
Institute of photoelectronics, Nankai Univ.
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