Low temperature poly-Si TFT with metal induced crystallization of amorphous silicon at 440℃
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概要
- 論文の詳細を見る
Amorphous Silicon(a-Si)films were deposited by PECVD and then crystallized by metal induced crystallization(MIC)at various temperatures. The crystallization temperature was reduced to as low as 440℃. The Ni-MIC pSi thin films were characterized by XRD, SEM and XPS. The depth profiles of structure and chemical components of the films were analyzed, and the crystallization mechanism was discussed. The poly-Si TFT was fabricated using Ni-MIC.
- 社団法人電子情報通信学会の論文
- 2000-10-13
著者
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李 育林
中国科学院西安光机所
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Li Yulin
Xi'an Institute Of 0ptics And Precision Mechanics Academia Sinica
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Zhao Ying
Institute Of Photoelectronics Nankai University
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〓 穎
中国天津南〓大学光〓子所
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Li Y
Irico Group Corp. Chn
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Li Yi
Guangdong Fortune Color Picture Tube Co. Ltd
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Zhang Yu
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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WU Yuan
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Huang Ximin
North LC Center, Changchun Institute of Physics
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HUANG Xinfan
State Key Laboratory of Solid State Microstrucrures, and Department of Physics, Nanjing University
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Huang Ximin
North Lcd R&d Center Of China And Changchun Institute Of Physics Academia Sinica
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Huang Ximin
North Lc Center Changchun Institute Of Optics Mechanics And Physics
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Huang Ximin
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Science
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Huang Ximin
North Lcd R&d Center Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of
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Liu Chuanzhen
North LCD R&D Center
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Yang Bailiang
North LCD R&D Center
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Ji Shiyang
North LCD R&D Center
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Li Mujv
North LCD R&D Center
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Zhang Yu
North LCD R&D Center
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Wu Yuan
North LCD R&D Center
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Wang Dahai
North LCD R&D Center
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Liao Yanping
North LCD R&D Center
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Qiu Fabin
North LCD R&D Center
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Yihua Li
North LCD R&D Center, Changchun Institute of Optics, Fine Mechanics and Physics Chinese Academy of S
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Zhang Y
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Li Muju
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Wu Y
Data Storage Inst. Sgp
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Wu Yuan
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Wu Y
Superconductivity Research Laboratory International Superconductivity Technology Center
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Qiu Fabin
North Lcd R&d Center Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of
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Wang Dahai
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Ji Shiyang
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Liao Yanping
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Yang B
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Liu Chuanzhen
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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