Al-Based Electrodes for Large Size and High Resolution TFT AM-LCDs (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
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概要
- 論文の詳細を見る
The signal deformation due to RC(Resistivity-Capacitance)delay is simulated for high-information-content displays based on a simplified equivalent circuit model. The electrode resistivity requirement for large size and high resolution TFT AM-LCDs is scaled. Al-based metal films such as Al-Ta and Al-Cr alloys as well as Al-Mo clay are eposited by magnetron sputtering. Asdeposited films are annealed in vacuum at 400℃ to examine their thermal stability. The samples are characterized with SEM and Four-Probe measurement. The optimum sputtering conditions are obtained.
- 社団法人映像情報メディア学会の論文
- 2000-10-20
著者
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李 育林
中国科学院西安光机所
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Li Yulin
Xi'an Institute Of 0ptics And Precision Mechanics Academia Sinica
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Zhao Ying
Institute Of Photoelectronics Nankai University
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〓 穎
中国天津南〓大学光〓子所
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Li Y
Irico Group Corp. Chn
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Li Yi
Guangdong Fortune Color Picture Tube Co. Ltd
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Zhang Yu
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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WU Yuan
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Wang Gang
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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Wang Gang
Beijing Astronomical Observatory Chinese Academy Of Sciences
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Wang Gang
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Wang Gang
Faculty Of Agriculture Shizuoka University
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LI Muju
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. North LCD R&D
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LI Yihua
Changchun Institute of Optics, Fine Mechanics and Physics, m Chinese Academy of Science. North LCD R
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LIU Chuanzhen
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. North LCD R&D
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JI Shiyang
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. North LCD R&D
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WANG Dahai
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. North LCD R&D
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LIAO Yanping
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. North LCD R&D
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WU Yuan
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. North LCD R&D
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YANG Bailiang
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. North LCD R&D
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Zhang Y
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Li Muju
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Wu Y
Data Storage Inst. Sgp
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Wu Yuan
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Wu Y
Superconductivity Research Laboratory International Superconductivity Technology Center
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Wang Dahai
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Ji Shiyang
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Liao Yanping
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Yang B
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Yang Bailiang
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences:north Lc Engine
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Liu Chuanzhen
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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