Low Temperature Poly-Si TFT with Metal Induced Crystallization of Amorphous Silicon at 440℃ (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
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概要
- 論文の詳細を見る
Amorphous Silicon(a-Si)films were deposited by PECVD and then crystallized by metal induced crystallization(MIC)at various temperatures. The crystallization temperature was reduced to as low as 440℃. The Ni-MIC p-Si thin films were characterized by XRD, SEM and XPS. The depth profiles of structure and chemical components of the films were analyzed, and the crystallization mechanism was discussed. The poly-Si TFT was fabricated using Ni-MIC.
- 社団法人映像情報メディア学会の論文
- 2000-10-20
著者
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李 育林
中国科学院西安光机所
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Li Yulin
Xi'an Institute Of 0ptics And Precision Mechanics Academia Sinica
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Zhao Ying
Institute Of Photoelectronics Nankai University
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〓 穎
中国天津南〓大学光〓子所
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Li Y
Irico Group Corp. Chn
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Li Yi
Guangdong Fortune Color Picture Tube Co. Ltd
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Zhang Yu
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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WU Yuan
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Huang Ximin
North LC Center, Changchun Institute of Physics
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HUANG Xinfan
State Key Laboratory of Solid State Microstrucrures, and Department of Physics, Nanjing University
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Huang Ximin
North Lcd R&d Center Of China And Changchun Institute Of Physics Academia Sinica
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Huang Ximin
North Lc Center Changchun Institute Of Optics Mechanics And Physics
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Huang Ximin
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Science
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Huang Ximin
North Lcd R&d Center Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of
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Liu Chuanzhen
North LCD R&D Center
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Yang Bailiang
North LCD R&D Center
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Ji Shiyang
North LCD R&D Center
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Li Mujv
North LCD R&D Center
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Zhang Yu
North LCD R&D Center
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Wu Yuan
North LCD R&D Center
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Wang Dahai
North LCD R&D Center
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Liao Yanping
North LCD R&D Center
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Li Yihua
North LCD R&D Center
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Qiu Fabin
North LCD R&D Center
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Zhang Y
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Li Muju
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Wu Y
Data Storage Inst. Sgp
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Wu Yuan
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Wu Y
Superconductivity Research Laboratory International Superconductivity Technology Center
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Qiu Fabin
North Lcd R&d Center Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of
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Wang Dahai
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Ji Shiyang
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Liao Yanping
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Yang B
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Liu Chuanzhen
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Yang Gailiang
North LCD R&D Center
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