NUMERICAL SIMULATION ON A NOVEL MIXED DUAL BEAM LASER CRYSTALLIZATION METHOD
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概要
- 論文の詳細を見る
We ropose a novel mixed dual bean laser crystallization method, where two different pulse lasers with different wavelength successively irrdiate on Si fi1m. Thermodynamic computer model of 1aser annealing is used to analyze the solidification characteristics of Si film annealed by the novel method. The simulation results demonstrate that the novel method is a promising one to reduce solidification velocity effectively.
- 社団法人電子情報通信学会の論文
- 1997-02-13
著者
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Zhao Ying
Institute of Bioengineering and Nanotechnology
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Zhang Jianjun
Institute Of Photoelectronics Nankai Univ.
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Zhao Y
Nankai Univ. Tianjin Chn
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Zhao Ying
Institute Of Photoelectronics Nankai University
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〓 穎
中国天津南〓大学光〓子所
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Zhang Y
Changchun Institute Of Optics Fine Mechanics And Physics Chinese Academy Of Sciences.
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Chen Shao-shan
Std Display Techno1ogy Engineering Co. Ltd
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Sun Zhonglin
Institute of photoelectronics, Nankai Univ.
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Wu Chunrya
Institute of photoelectronics, Nankai Univ.
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Sun H.
XMR Inc.
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Chen Sheau-Sheng
XMR Inc.
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Wu Chunrya
Institute Of Photoelectronics Nankai Univ.
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〓 春〓
中国天津南〓大学光〓子所
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Sun Zhonglin
Institute Of Photoelectronics Nankai Univ.
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