Focusing Field Emission Arrays Constructed by Self-Aligned Photolithography
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概要
- 論文の詳細を見る
A self-aligned photolithography has been proposed to construct double-Sated field-emission array. The originalities of the present method consist in the use of the Spindt type emitters and the diameter adjustable focusing gates. A scanning electron microscope image shows the microstructure of the field-emission array, where the ratio of the focusing gate diameter to that of the extraction gate is about 2.
- 社団法人電子情報通信学会の論文
- 2000-10-13
著者
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Zhang Jianjun
Institute Of Photoelectronics Nankai Univ.
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Qu Xiaosheng
Department Of Electronic Engineering Thsinghua University
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Du Bingchu
Department Of Electronics Engineering Tsinghua University
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Zhang Jinchi
Department of Electronics Engineering, Tsinghua University
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Li Dejie
Department of Electronics Engineering, Tsinghua University
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Yao Baolun
Department of Electronics Engineering, Tsinghua University
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Qu Xiaoshemg
Department of Electronics Engineering, Tsinghua University
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Li D
Department Of Electronic Engineering Thsinghua University
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Yao Baolun
Department Of Electronic Engineering Thsinghua University
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Qu Xiaoshemg
Department Of Electronics Engineering Tsinghua University
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Li Dejie
Department of electronic engineering, Thsinghua University
関連論文
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- Focusing Field Emission Arrays Constructed by Self-Aligned Photolithography (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
- Focusing Field Emission Arrays Constructed by Self-Aligned Photolithography
- 新型混合双光束激光退火法的模〓分析
- Investigation on the Simulating Field and Track of Electrons in FFEA (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
- Investigation on the Simulating Field and Track of Electrons in FFEA