Piezoelectric Microcantilever Array for Multiprobe Scanning Force Microscopy (Special Issue on Micromachine Technology)
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概要
- 論文の詳細を見る
We have developed and operated a newly conceived multiprobe scanning force microscope (SFM) using microfabricated piezoelectric cantilevers. An array of piezoelectric microcantilevers with a piezoelectric ZnO layer on an SiO_2 film makes it possible to build a multiprobe SFM system. Multiprobe SFMs are required for the application of SFM to the probe lithography and high density data storage. Each cantilever probe of multiprobe system should have a detector for sensing of its own deflection and an actuator for positioning of its tip. The piezoelectric cantilever can detect its own vibration amplitude by measuring the piezoelectric current, and it can also drive its tip by applying a voltage to the piezoelectric layer. Therefore, the piezoelectric cantilever is suitable for each cantilever of the array in the multiprobe SFM. We have verified the applicability of the piezoelectric cantilever to each lever of the array by characterizing the sensitivities of the deflection sensing and actuation. The ZnO piezoelectric cantilever with the length of 125μm works as the z scanner with the sensitivity of 20nm/V. We have also fabricated an experimental piezoelectric microcantilever array with ten cantilevers. We have constructed parallel operation SFM system with two cantilevers of the fabricated array and successfully obtained parallel images of 1μm pitch grating in constant height mode.
- 社団法人電子情報通信学会の論文
- 1997-02-25
著者
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Suga Tadatomo
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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Itoh Toshihiro
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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AZUMI Ryutaro
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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Azumi Ryutaro
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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