Scanning Force Microscope Using Piezoelectric Excitation and Detection
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概要
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This paper reports on a new dynamic scanning force microscope (SFM), in which the piezoelectric micro-cantilever is utilized for the lever excitation and displacement sensing. Piezoelectric cantilevers can detect their deflection without external sensing elements and be vibrated with no oscillator outside. The cantilever integrated with the deflection detector and the oscillator changes the conventional construction of a dynamic SFM and expands its range of applicability. The microcantilever used consists of a ZnO layer sandwiched with Au electrodes deposited on a thin beam of thermally grown SiO_2. The length, width and thickness of the lever are 125μm, 50μm and 3.5μm, respectively. We have characterized this cantilever by measuring the charge spectrum and the frequency dependence of the admittance. From the charge spectrum the mechanical quality factor measured 300 in free vibration. Typical piezoelectric constant of the ZnO film was estimated approximately as 80% of single-crystal's value. The piezoelectric cantilever can be vibrated by applying the voltage with the frequency near the resonance to the piezoelectric layer. The excited amplitude per unit voltage at the resonance frequency was calculated as about 5μm/V. The cantilever amplitude can be detected by measuring the current between electrodes, since the admittance depends on the quality factor. We have constructed a dynamic SFM without external oscillator and detector, and successfully obtained the surface images of a sol-gel derived PZT film in the cyclic contact operation mode. The longitudinal resolution of the SFM system was 0.3 nm at a 125 Hz bandwidth.
- 社団法人電子情報通信学会の論文
- 1995-02-25
著者
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Suga T
Univ. Tokyo Tokyo Jpn
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Itoh T
Ntt Corp. Atsugi‐shi Jpn
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Suga Tadatomo
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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Itoh Toshihiro
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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Ohashi Takahiro
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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