磁気共鳴周波数が1GHzを越えるNi-Znフェライトめっき膜 : ソフト磁性材料

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Ni-Zn ferrite films 0.2-1.2 μm in thickness were prepared by spraying a reaction solution of FeCl_2(+FeCl_3)+NiCl_2+ZnCl_2 (pH = 6.95) and an oxidizing solution of NaNO_2 + CH_3COONH_4 (+NH_3) simultaneously onto spinning glass substrates at a substrate temperature of 90℃ - Films with a thickness of 0.48 μm deposited by the conventional spin-spray method using only Fe^<2+> as iron ions exhibited a high permeability μ' of 42 and a high magnetic resonance frequency f_r of 650 MHz. This was 5 times as high as the value for Ni-Zn ferrite bulk. Film plated by adding NH_3 to an oxidizing solution and film deposited by using a mixture of Fe^<3+> (10%) and Fe^<2+> (90%) as iron ions exhibited higher f_r values of 900 MHz and 1.2 GHz, respectively. Since not only the real part μ' but also the imaginary part μ" had large values of about 30 at 1 GHz, the films prepared in this study will be applicable to rf inductors as well as wave absorbers for suppressing EMI in the quasi-microwave range exceeding 1 GHz.
社団法人日本磁気学会の論文
2002-04-01