522 真空装置類における高機能面形成・評価技術

概要

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In the manufacturing technology and design of vacuum apparatus, the next two items on its surface function have been the subjects to be solved for a long time ; (1) Prevention of air leakage, (2) Decrease of out-gas. Practically, their phenomena have now become to understand pretty well, thanks to not noly basic researches but also a lot of information, knowledge and know-how accumulated on the way of progress and development of this technology. However, we must admit the fact that viewpoints for this phenomena, which is micro-scopically induced by atomic or molecular behavior, are separated into the two extremes : i.e., a scientific viewpoint is academic and a technological viewpoint is practical, and their combination has not discussed sufficiently so far. In this paper, the surface function o nthe gas leakage and the out-gas phenomena were experimentally investigated standing upon the mid point (engineering side) and tried to evaluate their surfaces functions. As a result, some data relating the surface topography for the gas leakage and the out-gas were obtained.
一般社団法人日本機械学会の論文
2000-11-20