112 接触界面の空隙と気体の漏れに関する基礎研究(OS13 高機能面の形成技術)

概要

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Clearance at the interface of two solids in contact should be evaluated for sealing gas leakage. In this study, first of all, we designed experimental apparatus. It enabled us to detect the gas leakage in the sensitivity of 1.0 × 10^<-8> (Pa・ m^3/s) which is equivalent to the clearance of 10〜50nm. Next, the relations of gas leakage with the experimental parameters such as surface roughness of the interface, contact pressure, vacuum pressure, etc. were measured for the purpose that micro-space at the interface should be investigated. Namely, we tried to estimate the micro-space quantitatively based on the relation between the clearance at the interface of two solids metals in contact and their surface roughness. As a result, it becomes clear that qualitatively theoretical characteristics correspond comparatively well with experimental ones. However, the analytical values don't agree quantitatively with the experimental ones, approximately doubled. It would be caused by the reason that rising up of the valley part of the surface roughness appears due to deformation of top asperities in contact.
一般社団法人日本機械学会の論文
2001-11-20