チョクラルスキー法による単結晶育成時の融液中の対流の振動現象と磁場による変動抑制に関する研究

概要

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Parameter sensitivity and the effect of a magnetic field on the onset of oscillatory flow in a Czochralski growth melt are investigated. It is widely recognized that the crystal defects known as striations are caused by the macroscopic oscillation of the flow, heat and mass transfer in the melt. An oscillatory flow is observed in the melt under a certain condition resulting from interation between natural and forced convections in a rotating container during an experiment that simulates Czochralski growth. The result reveals that oscillatory flow in the melt is inherent to the system. The critical Reynolds number for the onset of oscillation and the oscillation period decrease with increases in the Prandtl number and the Rayleigh number. It is also found that an oscillatory flow can occur in a real system, and can be suppressed by applying an external magnetic field.
社団法人日本機械学会の論文
1989-09-25