二次元的表面粗さの光学的測定法

概要

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Scattered light from the surface of a specimen illuminated with a beam of light will broaden as the surface roughness increases. The scattered light intensity distribution measured with a CCD camera was approximated with a two-dimensional (2-D) Gaussian function, and the surface roughness in two orthogonal directions was evaluated using the standard deviations σ_x and σ_y With respect to the x and y axes of the function. The half-width B and integral width C can be expressed with the standard deviation of the function and they can also be used for evaluating the surface roughness. Two kinds of specimens were used ; ground specimens and wet-blasted specimens with and without directionality of the surface roughness. For ground specimens, the integral width C_y of the cross section perpendicular to the grinding direction increased rapidly with increasing surface roughness R_q, while C_x of the cross section parallel to the grinding direction remained almost unchanged. For the wet-blasted specimens, on the other hand, no difference was observed between C_x and C_y.
一般社団法人日本機械学会の論文
2001-01-25