二次元ガウス関数を用いた光学的表面粗さ測定法

概要

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A new noncontact optical technique for rapidly measuring the surface roughness was proposed. The surfaces of ground specimens were illuminated with a LED light. The reflected light intensity distribution was measured with a CCD optical sensor, and it was approximated by a two-dimensional (2-D) Gaussian function. The standard deviations of the 2-D Gaussian function, σ_x and σ_y, with respect to the x and y axes were calculated for evaluating the broadness of the reflected intensity distribution curve in the two directions. The standard deviation σ_x with respect to the axis perpendicular to the ground direction increased with increasing the center line-averaged surface roughness Ra, giving the experimental relationship Ra = 21.9σ^2_x-6.8σ_x+0.6. On the other hand, the standard deviation σ_y with respect to the ground direction remained unchanged, independent of the surface roughness Ra. This technique allows optical measurement of the surface roughness in two perpendicularly intersecting directions simultaneously.
一般社団法人日本機械学会の論文
1993-04-25