空気ばねと磁気軸受を併用した除振台の徴振動制御 : 第2報,H_∞制御と外乱相殺制御による除振性能

概要

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In this study, we apply digital control to a micro-vibration isolation system using both air springs and magnetic bearings. We design two isolation control systems : a disturbance cancellation control system consisting of both the feedback and the feedforward control loops, and an H_∞ control system designed by applying the solution of the H_∞ 4 block problem. We first compare the two isolation systems through by means of simulation. The calculated results show that both systems can achieve excellent isolation performance. Also it is known that the disturbance cancellation effect can be accomplished by H_∞ control, and the H_∞ control system is stable against variations of the loading weight on the isolation table. Moreover, experiments using DSP (digital signal processor) are performed on the actual isolation system. The experimental results are almost the same as the simulated ones, and the effectiveness of H_∞ control is confirmed.
一般社団法人日本機械学会の論文
1995-07-25