B24-073 DERIVATION OF THE FILM CHARACTERISTIC CONSTANTS USING THE GOVERNING PARAMETER FOR ELECTROMIGRATION DAMAGE AT METAL LINE ENDS

概要

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Recently an expression of the governing parameter for electromigration damage at the line ends, AFD genlend, was derived considering the boundary condition of the atomic diffusion at the line ends, namely, no incoming and outgoing of atoms at cathode end and anode one, respectively. The governing parameter for electromigration damage at the line ends is expected to be useful in order to evaluate the reliability of the metal line connected by vias. By the way, it is known that the edge of cathode end of metal line drifts in the direction of electron flow as a result of electromigration. In this study, first, the drift velocity is theoretically expressed utilizing AFD^*_<gen|end> to construct the derivation method of the film characteristics. By this derivation method, the film characteristic constants in AFD^*_<gen|end> are determined only from the measurement of the drift velocity. Next, the metal line not connected by pads is treated, and the drift velocity in such line is experimentally measured. By equating the theoretical drift velocity with experimental one, the film characteristic constants are obtained. It is shown that AFD^*_<gen|end>-based method can appropriately determine the film characteristic constants.
一般社団法人日本機械学会の論文
2003-11-30