B12-111 Thermal aspects of micro-mechanical engineering

概要

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In the present study, sensors for experimental investigations and modeling methods developed for analyzing thermal characteristics of microstructures are introduced. For this purpose, the paper consists of two parts; the first part covers sensors developed for experimental investigation of heat transfer and fluid flow in microstructures, and the second part focuses on modeling methods for the thermal design and optimization of microstructures. In the experimental part, the micro-sensors, which can be used to measure the temperature distribution at the surface of a microstructure and the mass flow rate passing through it, are described. Also, the characteristics and manufacturing processes for the sensors are presented. In the theoretical part, this paper deals with three modeling methods for thermal design and optimization of a microstructure. The thermal optimization of a microchannel heat sink is chosen as a case study to elucidate the three methods. Finally, the results of fluid flow and heat transfer characteristics for the microchannel heat sink based on the three modeling methods are presented.
一般社団法人日本機械学会の論文
2003-11-30