金属アルコキシド法による金属導電性BaPbO_3薄膜の作製と導電性

概要

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Dense barium metaplumbate (BaPbO_3) (BPO) thin films with good metallic conduction have been produced by a metal-alkoxide method. Addition of a small amount of triethyleneglycol was effective to obtain smooth films. Thin films were deposited on either cleaved MgO(100) single crystal substrates (MgO(100)) or oxidized single crystal Si(100) wafers (SiO_2/Si) by spin coating. Single-phase BPO films were obtained by firing at 500°C in O_2 flow when a combination of Ba(OCH_2CH_2OCH_3)_2, Pb(OCH_2CH_3)_2 and CH_3CH_2OH was used as the raw materials and solvent. Dense BPO thin films deposited on MgO(100) and SiO_2/Si substrates had a room-temperature resistivity of about 2.6 and 0.7 mΩ・cm, respectively, comparable to a typical value of 0.5 mΩ・cm in bulk BPO ceramics produced by powder processing. The electrical propoerty of the obtained films is indicative of their potential use as an electrode material for ferroelectric thin film devices.
1995-08-01