メソ構造チタニア薄膜の形成における結晶化の影響(<特集>セラミックスインテグレーション)

概要

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Strict control of the crystallization of TiO_2 is one of the most important factors in forming mesoporous structured TiO_2 thin films. Effects of the crystallization of TiO_2 on the formation of mesoporous structures have been studied by transmission electron microscopy (TEM) and high-resolution TEM (HRTEM) observation and X-ray diffractometry (XRD) analysis. The obtained well-ordered mesoporous TiO_2 thin films, calcined at 450℃ to remove the template, are composed of a continuous non-crystalline TiO_2 matrix containing TiO_2 nanocrystals, whose mean size is sufficiently small to support the mesostructure. In the mean time, the mesoporous TiO_2 materials that almost lose their ordered structure after calcination consist of large TiO_2 crystallites (over 6 nm), and the overgrowth of TiO_2 crystallites cause a collapse of the mesoporous structure.
社団法人日本セラミックス協会の論文
2002-05-01