高濃度ゾルーゲル法による2次元ゲルフォトニッタ結晶の合成(<特集>セラミックスインテグレーション)

概要

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Two-dimensional (2D) photonic crystals (PCs) of transparent TiO_2 gel rods, with a diameter in the range of 0.5 to 2.0μm, arrayed in a triangular lattice with a lattice constant between 1.0 and 4.0 μm, were successfully fabricated from a titanium tetra-isopropoxide (Ti (O^iPr)_4) ethylene glycol monomethyl ether (EGMME) solution using resist molds. The resist molds were fabricated on a Si wafer by electron-beam lithography. By casting the solution into the resist molds, we obtained TiO_2 gel PC_s, which contained polyethylene glycol (55-60 mass%) used as a plasticizer, formed on gel plates with the same composition over an area of 500 μm × 500 μm. This method enabled the preparation of dense, highly transparent TiO_2 gel PC_s. Distinct changes in both reflected and transmitted colors were observed in the present gel PC_s, demonstrating that they function as photonic crystals in the visible region.
社団法人日本セラミックス協会の論文
2002-05-01