高濃度ゾルを用いた電気泳動成膜法によるチタン酸バリウム膜の作製

概要

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We used a high-concentration sol-gel process and an electrophoretic deposition technique to synthesize BaTiO_3 films. The particles were prepared by hydrolyzing a high-concentration alkoxide precursor solution. At the hydrolysis stage, it was important to use a sufficient amount of water to produce the particles, and to cool the hydrolyzed precursor solution with a cooling device to prevent gel from forming. When voltage was applied across the pair of electrodes, a gel film was deposited at the cathode. Heating the gel films at low temperature yielded stoichiometric BaTiO_3 films. The process appears to be due to the deposition by electrophoresis of particles from the high-concentration sol. The gel films that were formed had a two-layer structure. The lower layer that firmly adhered to the electrode plate was dense, and this layer was overlaid with the upper layer of a loose gel film.
社団法人日本セラミックス協会の論文
2002-12-01