湿度に感応する圧電アクチュエーター

概要

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Bending behavior responsive to environmental humidi ty was investigated on a PZT actuator consisting of porous and dense PZT plates (Pb_<0.995>Nb_<0.001> (Zr_<0.53> Ti_<0.47>) _<0.99>O_3) . A dense PZT plate with a high electrical resistivity was bonded to a porous PZT plate by hot pressing, which showed a large resistivity change from 10^<14> to 10^7Ω cm for a change of relative humidity from 5 to 85%. In such a structure, DC voltage applied to the bonded plate gives an electric field on both parts at a low hwnidity, but only on the dense part at a high humidity. A bending displacement responsive to a change of humidity was observed ill the bonded PZT plates under DC bias. The bending mode was similar to that of a unimorph. The hot pressing temperature affected the microstructure and humidity sensitivity of the porous PZT plate, and then the bending behavior of the PZT actuator.
社団法人日本セラミックス協会の論文
1994-06-01