X線光電子分光法による窒化アルミニウム粉末の表面状態と耐候性の分析

概要

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The surface state of as-prepared AIN powders produced by direct nitridation and carbothermal methods was characterized by X-ray photoelectron spectroscopy (XPS) and X-ray excited Auger electron spectroscopy (XAES). In the as-prepared AIN powders, small peaks assigned to imide and amide groups were detected in the N1s XPS spectra of directly nitrided powders but not in those of the carbothermally treated powders. Both an oxidized surface phase and a parent AIN phase could be distinguished in the Al2p XPS and Al(KLL) XAES spectra of all the samples. The structural state of the oxidized surface phase was found to be similar to γ-Al_2O_3. The average thickness of the oxidized surface phase was determined to be about 0.5-0.6 nm in directly nitrided AIN powders whereas it was 1.1 nm in carbothermally treated AIN powders. The thickness of the oxidized surface phase increased with increasing storage times of the AIN powders in a container under ambient atmosphere. The increase of thickness with storage time of the oxidized surface phase in directly nitrided AIN powder was faster than in the carbothermally treated AIN powder. The oxidized surface phase changed from γ-Al_2O_3 in the as-prepared AIN powders to a hydroxide phase during storage.
1998-08-01