回転粉体床CVDによるTiB_2-TiN二層被覆鉄粉体の調製

概要

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A composite iron powder coated with TiB_2 and TiN double layers was prepared by the continuous rotary powder bed chemical vapor deposition in the reactant systems of TiCl_4-B_2H_6-H_2 and TiCl_4-N_2-H_2. TiN was coated on to spherical iron powder with a particle diameter of 70-120 μm under the following deposition conditions , temperature : 1000℃, reaction time : 0-120 min, flow rate : TiCl_4 3 ml/min, N_2 200 ml/min, H_2 300 ml/min, Ar 20 ml/min, and the rotation speed of specimen cell : 90 rpm. Crystalline or amorphous TiB_2 was subsequently coated on to TiN coated iron powder under the conditions : temperature : 600°-850℃, reaction time : 60-240 min, flow rate ratio of B_2H_6 to TiCl_4, R = 0.16, H_2 300 ml/min, Ar 140-300 ml/min. The composite iron powder covered with uniform and adherent double layers of TiB_2 and TiN was oxidation-resistant up to 700℃ in air.
社団法人日本セラミックス協会の論文
1990-05-01