窒化ケイ素セラミックスの大気炉焼結(第2報) : つめ粉の凝集とアルミナるつぼの劣化

概要

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Si_3N_4 ceramics were sintered at temperature range of 1550-1700℃ in an air atmosphere furnace using an Al_2O_3 crucible, Si_3N_4 packing powder and Al_2O_3 filler. Si_3N_4 packing powder and Al_2O_3 filler tended to agglomerate. It was found that coarse SN-F2 packing powder was the best candidate when process cost was considered and Al_2O_3 powder larger than 1-2 μm did not agglomerate even at 1700℃. Additionally, an Al_2O_3 crucible filled with Si_3N_4 powder is deteriorated and cracked after only several times using. Nevertheless, Si_3N_4 ceramic could be sintered to full density reproducibly. However, its mechanical strength was not high enough, and both the strength and the deterioration of crucible should be further improved.
社団法人日本セラミックス協会の論文
2004-04-01