Si_3N_4セラミックスの焼結過程における固相-気相反応(第7報) : Si_3N_4セラミックス焼結体熱処理時の質量損失の温度依存性

概要

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The relationship between mass loss of Si_3N_4 ceramics during heat treatment and heat treatment temperature was quantitatively examined to elucidate the rate-determining factor of mass loss. Sintered Si_3N_4 ceramics were heat-treated at 1823-2098 K under 0.1 MPa N_2 and mass loss during heat treatment was measured. The mass loss increased with increasing temperature and the slope of the Arrhenius plot of the mass loss rate was similar to that of the equilibrium gas pressure of SiO generated from the mass loss reaction of Si_3N_4 ceramics. This finding suggests that the rate-determining factor of mass loss is the diffusion rate of SiO to the outside of the sagger.
社団法人日本セラミックス協会の論文
2001-11-01